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BS ISO 16531:2013

Standard Number
BS ISO 16531:2013
Title
Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
Status
Current
Publication Date
31 May 2013
Cross References
ISO 18115-1, ISO 14606:2000

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Descriptors
CHEMICAL ANALYSIS AND TESTING, SURFACE CHEMISTRY, SURFACES, SPECTROSCOPY, CHEMICAL COMPOSITION, THICKNESS, MASS, QUANTITATIVE ANALYSIS, OPTICAL MEASUREMENT, GLOW DISCHARGES
Title in French
Analyse chimique des surfaces. Profilage d’paisseur. Mthodes d’alignement du faisceau d’ions et la mesure associe de densit de courant ou de courant pour le profilage d’paisseur en AES et XPS
Pages
30
File Size
1.777 MB
Price
140.00

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