Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
CHEMICAL ANALYSIS AND TESTING, SURFACE CHEMISTRY, SURFACES, SPECTROSCOPY, CHEMICAL COMPOSITION, THICKNESS, MASS, QUANTITATIVE ANALYSIS, OPTICAL MEASUREMENT, GLOW DISCHARGES
Title in French
Analyse chimique des surfaces. Profilage d’paisseur. Mthodes d’alignement du faisceau d’ions et la mesure associe de densit de courant ou de courant pour le profilage d’paisseur en AES et XPS
