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BS EN ISO 14644-8:2013

Standard Number
BS EN ISO 14644-8:2013
Title
Cleanrooms and associated controlled environmentsClassification of air cleanliness by chemical concentration (ACC)
Status
Current
Publication Date
28 February 2013
Cross References
ISO 14644-6, ISO 14644-4:2001, ISO 14644-5:2004, ISO 14644-7:2004, ISO 14698, SEMI F21-1102, IEST-G-CC035.1, ASTM D5127-99, JACA No. 34-:2000, JACA No. 35A-2003, JACA No. 43-2006, SEMI E108-0307, IEST-RP-CC031.2, IDEMA Standard M11-99, JIS B9917-8:2010, SEMI E45-1101, SEMI E460307
Replaces
BS EN ISO 14644-8:2006

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Descriptors
Clean rooms, Environmental cleanliness, Environment (working), Classification systems, Molecules, Contamination, Air pollution, Air, Designations, Concentration, Verification, Chemical analysis and testing, Test equipment, Sampling methods
Title in French
Salles propres et environnements matriss apparents. Classification de la propret chimique de lair
Title in German
Reinrume und zugehrige Reinraumbereiche. Klassifizierung der Luftreinheit anhand der Chemikalienkonzentration (ACC)
Pages
34
File Size
1.454 MB
Price
162.00

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