ETSI TS 123 086 ...
JIS G 1211-5:2011 ...
Standard Number
BS EN ISO 14644-10:2013
Title
Cleanrooms and associated controlled environmentsClassification of surface cleanliness by chemical concentration
Status
Current
Publication Date
30 April 2013
Cross References
ISO 14644-1, ISO 14644-6, ISO 14644-8, ISO 14644-9, ISO 18115-1, ISO 17052, ISO 18116, ISO 10312
Descriptors
Controlled-atmosphere rooms, Environmental cleanliness, Classification systems, Surfaces, Chemical cleaning, Concentration (chemical)
Title in French
Salles propres et environnements matriss apparents. Classification de la propret chimique des surfaces
Title in German
Reinrume und zugehrige Reinraumbereiche. Klassifizierung der chemischen Oberflchenreinheit
Pages
40
File Size
2.227 MB
Price
162.00
