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BS EN 62047-11:2013

Standard Number
BS EN 62047-11:2013
Title
Semiconductor devices. Micro-electromechanical devicesTest method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
Status
Current
Publication Date
31 October 2013
Cross References
IEC 62047-3, EN 62047-3, ASTM E228 – 11, ASTM E289 – 04(2010), ASTM E831 – 06

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Descriptors
Semiconductor devices, Electronic equipment and components, Electromechanical devices, Vocabulary, Terminology, Semiconductor technology, Integrated circuits
Title in French
Dispositifs semiconducteurs. Dispositifs microlectromcaniques. Mthode dessai pour les coefficients de dilatation thermique linaire des matriaux autonomes pour systmes microlectromcaniques
Title in German
Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Prfverfahren fr lineare thermische Ausdehnungskoeffizienten fr freistehende Werkstoffe der Mikrosystemtechnik
Pages
24
File Size
1.629 MB
Price
140.00

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