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Home>BS EN ISO 14644-9:2012

BS EN ISO 14644-9:2012

Standard Number
BS EN ISO 14644-9:2012
Title
Cleanrooms and associated controlled environmentsClassification of surface cleanliness by particle concentration
Status
Current
Publication Date
31 August 2012
Cross References
ISO 14644-6:2007, ISO 4287:1997, ISO 4288:1996, ISO 5725-2:1994, ISO 10015:1999, ISO 10576-1:2003, ISO 16232-2:2007, ISO 16232-3:2007, ISO 16232-4:2007, ISO 16232-5:2007, ISO/TS 21748:2004, IEC 61340-5-1:2007, ASTM E18-07, ASTM E1216-06, ASTM F312-08, ASTM F24-09, ASTM F303-08, CLC/TR 61340-5-2:2008, IEST-RP-CC022.2-2004, IEST-STD-CC1246D, SEMI E43-0301, SEMI E78-0706

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Descriptors
Clean rooms, Cleaning equipment, Environment (working), Environmental cleanliness, Molecules, Contamination, Surfaces, Chemical analysis and testing
Title in French
Salles propres et environnements matriss apparents. Classification de la propret des surfaces par la concentration de particules
Title in German
Reinrume und zugehrige Reinraumbereiche. Klassifzierung der partikulren Oberflchenreinheit
Pages
36
File Size
1.301 MB
Price
156.00

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