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BS EN 62047-14:2012

Standard Number
BS EN 62047-14:2012
Title
Semiconductor devices. Micro-electromechanical devicesForming limit measuring method of metallic film materials
Status
Current
Publication Date
31 May 2012
Cross References
IEC 62047-1:2005, EN 62047-1:2006, IEC 62047-1:2005

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Descriptors
Semiconductor devices, Electronic equipment and components, Electromechanical devices, Semiconductor technology, Integrated circuits, Thin-film devices, Fatigue testing, Bend testing, Resonance, Vibration, Test specimens, Test equipment
Title in French
Dispositifs semiconducteurs. Dispositifs microlectromcaniques. Mthode de mesure des limites de formage des matriaux couche mtallique
Title in German
Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Verfahren zur Ermittlung der Grenzformnderung metallischer Dnnschichtwerkstoffe
Pages
22
File Size
1.368 MB
Price
96.00

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