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BS ISO 14701:2011

Standard Number
BS ISO 14701:2011
Title
Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
Status
Current
Publication Date
31 August 2011
Cross References
ISO 18116, ISO/TR 18392, ISO/IEC Guide 98-3:2008

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Descriptors
Surface chemistry, Surface properties, Chemical analysis and testing, Spectroscopy, Photoelectron spectroscopy, X-ray photoelectron spectroscopy, Electron emission, Silicon, Oxides, Thickness measurement
Title in French
Analyse chimique des surfaces. Spectroscopie de photolectrons par rayons X. Mesurage de lpaisseur doxyde de silicium
Pages
24
File Size
1.173 MB
Price
140.00

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