Semiconductor devices, Electronic equipment and components, Electromechanical devices, Semiconductor technology, Integrated circuits, Thin films, Tensile testing, Bend testing, Strips, Test specimens, Test equipment
Title in French
Dispositifs semiconducteurs. Dispositifs microlectromcaniques. Mthode dessai de la flexion de bandes en vue de la mesure des proprits de traction des couches minces
Title in German
Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Streifen-Biege-Prfverfahren zur Messung von Zugbeanspruchungsmerkmalen dnner Schichten
