Standard Number
BS EN 62047-9:2011
Title
Semiconductor devices. Micro-electromechanical devicesWafer to wafer bonding strength measurement for MEMS
Status
Current
Publication Date
31 January 2013
Cross References
IEC 60749-19, ISO 6892-1:2009, ASTM E399-06e2:2008, EN 60749-19, EN ISO 6892-1:2009, IEC 62047-2, ASTM E8M, IEC 60747-14-1, IEC 62047-4, EN 62047-2, EN 62047-4