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BS ISO 12406:2010

Standard Number
BS ISO 12406:2010
Title
Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon
Status
Current
Publication Date
30 November 2010
Cross References
ISO 14237:2010, ISO 18114:2003, ISO 18115-1, ISO 17560, ISO 5725-2

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Descriptors
Surface chemistry, Chemical analysis and testing, Surfaces, Mass spectrometry, Secondary, Ions, Silicon, Determination of content, Arsenic, Depth, Interferometry, Profile measurement
Title in French
Analyse chimique des surfaces. Spectromtrie de masse des ions secondaires. Dosage de larsenic dans le silicium par profilage dpaisseur
Title in German
Chemische Oberflchenanalyse. Sekundrionenmassenspektroskopie. Verfahren zur Tiefenprofilanalyse von Arsen in Silicium
Pages
24
File Size
1.413 MB
Price
140.00

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