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BS ISO 14237:2010

Standard Number
BS ISO 14237:2010
Title
Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials
Status
Current
Publication Date
31 August 2010
Cross References
ISO 17560, ISO 18114, SEMI MF1392-0307, SEMI MF43-0705, SEMI MF84-0307, SEMI MF723-0307, SEMI MF374-0307, SEMI MF95-1107, SEMI MF110-1107, SEMI MF672-0307, SEMI MF674-0705, ISO 5725-2
Replaces
BS ISO 14237:2000

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Descriptors
Surface chemistry, Chemical analysis and testing, Surface properties, Secondary, Ions, Mass spectrometry, Spectroscopy, Determination of content, Boron, Concentration (chemical), Single, Crystals, Silicon, Homogeneity, Doping agents, Semiconductor technology, Calibration, Control samples, Test equipment, Specimen preparation, Mathematical calculations, Precision, Statistical methods of analysis, Isotopes, Performance testing
Title in French
Analyse chimique des surfaces. Spectromtrie de masse des ions secondaires. Dosage des atomes de bore dans le silicium laide de matriaux dops uniformment
Title in German
Chemische Oberflchenanalyse. Sekundrionenmassenspektrometrie. Bestimmung des Elementgehalts von Bor in Silizium unter Verwendung gleichfrmig dotierter Materialien
Pages
30
File Size
743.7 KB
Price
140.00

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