Standard Number
BS EN 62047-4:2010
Title
Semiconductor devices. Micro-electromechanical devicesGeneric specification for MEMS
Status
Current
Publication Date
30 November 2010
Cross References
IEC 60027, IEC 60068-2, IEC 60617, IEC 60747-1:2006, IEC 60749, IEC 61193-2, IEC 62047-1, IEC QC 001002-3:2005, ISO 1000, ISO 2859-1, EN 60027, EN 60068-2, EN 60749, EN 61193-2, EN 62047-1, IEC 60410, IEC 60721-2-1, IEC 60721-3-0:1984, IEC 60721-3-0:1984/AMD 1:1987, IEC 60721-3-1, EN 60721-3-0, EN 60721-3-1