BS EN 62047-6:2010

Standard Number
BS EN 62047-6:2010
Title
Semiconductor devices. Micro-electromechanical devicesAxial fatigue testing methods of thin film materials
Status
Current
Publication Date
30 April 2010
Cross References
IEC 62047-2:2006, EN 62047-2:2006, ASTM E 1823-05a, ISO 1099, ASTM E 466-96, ISO 6892, ISO 12107

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Descriptors
Semiconductor devices, Electronic equipment and components, Electromechanical devices, Semiconductor technology, Integrated circuits, Thin films, Tensile testing, Fatigue testing, Axial stress, Test specimens, Test equipment
Title in French
Dispositifs semiconducteurs. Dispositifs microlectromcaniques. Mthodes dessais de fatigue axiale des matriaux en couche mince
Title in German
Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Prfverfahren zur uniaxialen Dauerschwingfestigkeit von Dnnschicht-Werkstoffen
Pages
20
File Size
1.3 MB
Price
100.00