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BS EN 62047-3:2006

Standard Number
BS EN 62047-3:2006
Title
Semiconductor devices. Micro-electromechanical devicesThin film standard test piece for tensile testing
Status
Current
Publication Date
30 November 2006
Cross References
IEC 62047-2, ISO 17561, EN 62047-2:2006

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Descriptors
Semiconductor devices, Electronic equipment and components, Electromechanical devices, Semiconductor technology, Integrated circuits, Thin films, Test specimens, Specimen preparation, Control samples, Tensile testing
Title in French
Dispositifs a semiconducteurs. Dispositifs microelectromecaniques. Eprouvette dessai normalisee en couche mince pour lessai de traction
Title in German
Halbleiterbauelemente. Bauteile der Mikrosystemtechnik. Duennschicht-Standardmikroprobe fuer die Pruefung der Zugbeanspruchung
Pages
12
File Size
432.9 KB
Price
82.00

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