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ISO/FDIS 14644-14

ISO/FDIS 14644-14

Assessment of suitability for use of equipment by airborn particle concentration

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This International Final Draft Standard specifies a methodology to assess the suitability of equipment (e. g. machinery, measuring equipment, process equipment, components, tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).

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