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ISO/DIS 14644-15

ISO/DIS 14644-15

Assessment of suitability for use of equipment and materials by airborn chemical concentration

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This standard provides requirements and guidance for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (ISO 14644-8).

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